The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2010
Filed:
Dec. 10, 2003
Stefan Bangert, Steinau, DE;
Frank Fuchs, Geiselbach-Ommersbach, DE;
Uwe Schuessler, Aschaffenburg, DE;
Ralph Lindenberg, Schoeneck, DE;
Tobias Stolley, Hanau, DE;
Stefan Bangert, Steinau, DE;
Frank Fuchs, Geiselbach-Ommersbach, DE;
Uwe Schuessler, Aschaffenburg, DE;
Ralph Lindenberg, Schoeneck, DE;
Tobias Stolley, Hanau, DE;
Applied Materials GmbH & Co. KG, Alzenau, DE;
Abstract
An arrangement for transporting a flat substrate through a coating installation, wherein the coating installation comprises, e.g., several and different sputter cathodes, to which the flat substrate, for example a glass pane, is transported one after the other in vacuo. So that no abrasion is generated between glass pane and contact, the glass pane is kept spaced apart from the contact by means of gas pressure. The gas pressure is herein built up through relatively few and small holes in a gas channel. Since during flooding of the coating installation to atmospheric pressure or during evacuation, due to the small holes, no fast pressure equalization between gas channel and the remaining coating installation is possible, the gas channel is decoupled in terms of gas from the remaining coating installation and provided with a separate gas line, via which gas can be introduced into the gas channel or pumped out of it.