The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2010
Filed:
Nov. 21, 2007
Kazuyuki Haneda, Ichihara, JP;
Yosuke Sato, Minamitsuru-gun, JP;
Kazuyuki Haneda, Ichihara, JP;
Yosuke Sato, Minamitsuru-gun, JP;
Showa Denko K.K., Tokyo, JP;
Citizen Seimitsu Co., Ltd., Yamanashi, JP;
Abstract
The polishing apparatus that polishes an inner circumferential surface of a disk-shaped substrate including a portion having a hole at the center thereof, the polishing apparatus is provided with: a rotating table that holds piled workpieces in which a plurality of disk-shaped substrates are piled, a polishing brush that is inserted into a portion having the hole of the disk-shaped substrates of the piled workpieces and is rotated, a cover member that covers the piled workpieces, and a polishing-liquid flowing-in unit that flows polishing liquid into the portion having the hole of the disk-shaped substrates of the piled workpieces covered by the cover member.