The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2010
Filed:
Jun. 28, 2006
Lior Kogut, Sunnyvale, CA (US);
Ming-hau Tung, San Francisco, CA (US);
Brian Arbuckle, Danville, CA (US);
Lior Kogut, Sunnyvale, CA (US);
Ming-Hau Tung, San Francisco, CA (US);
Brian Arbuckle, Danville, CA (US);
QUALCOMM MEMS Technologies, Inc., San Diego, CA (US);
Abstract
A microelectromechanical (MEMS) device includes a functional layer including a first material, a deformable layer including a second material different from the first material, and a connecting element including the first material. The connecting element is mechanically coupled to the deformable layer and the functional layer. The connecting element and the deformable layer form an interface between the first material and the second material. The interface is spaced from the functional layer.