The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 16, 2010

Filed:

Jun. 27, 2008
Applicants:

Arnd Kaelberer, Schlierbach, DE;

Helmut Baumann, Gomaringen, DE;

Roland Scheuerer, Reutlingen, DE;

Heribert Weber, Nuetingen, DE;

Inventors:

Arnd Kaelberer, Schlierbach, DE;

Helmut Baumann, Gomaringen, DE;

Roland Scheuerer, Reutlingen, DE;

Heribert Weber, Nuetingen, DE;

Assignee:

Robert Bosch GmbH, Stuttgart, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A device made of single-crystal silicon having a first side, a second side which is situated opposite to the first side, and a third side which extends from the first side to the second side, the first side and the second side each extending in aplane of the single-crystal silicon, the third side extending in a first area in aplane of the single-crystal silicon. The third side extends in a second area in aplane of the single-crystal silicon. Furthermore, a production method for producing a device made of single-crystal silicon is described.


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