The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2010
Filed:
Mar. 07, 2008
Yoshimasa Kobayashi, Nagoya, JP;
Yuji Katsuda, Tsushima, JP;
Hiroaki Sakai, Nagoya, JP;
Koichi Niihara, Nagaoka, JP;
Tadachika Nakayama, Nagaoka, JP;
Yoshimasa Kobayashi, Nagoya, JP;
Yuji Katsuda, Tsushima, JP;
Hiroaki Sakai, Nagoya, JP;
Koichi Niihara, Nagaoka, JP;
Tadachika Nakayama, Nagaoka, JP;
NGK Insulators, Ltd., Nagoya, JP;
Nagaoka University of Technology, Nagaoka-Shi, JP;
Abstract
There is provided an yttrium oxide-containing material with excellent mechanical characteristics. The yttrium oxide-containing material becomes strong by adding silicon carbide (SiC) and yttrium fluoride (YF) to yttrium oxide (YO). Accordingly, the yield, handling and reliability can be improved when this strengthened yttrium oxide-containing material is applied to and used for components of semiconductor manufacturing equipment.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile