The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2010
Filed:
Sep. 29, 2005
Applicants:
Peng-fei Fu, Midland, MI (US);
Eric Scott Moyer, Midland, MI (US);
Craig Rollin Yeakle, Midland, MI (US);
Inventors:
Peng-Fei Fu, Midland, MI (US);
Eric Scott Moyer, Midland, MI (US);
Craig Rollin Yeakle, Midland, MI (US);
Assignee:
Dow Corning Corporation, Midland, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/075 (2006.01);
U.S. Cl.
CPC ...
Abstract
Silsesquioxane resins useful in forming the antireflective coating having the formula (PhSiO(OH))HSiO(OH))(MeSiO(OH))(RSiO(OH))where Ph is a phenyl group, Me is a methyl group, R is selected from ester groups and polyether groups, x has a value of 0, 1 or 2; m has a value of 0.05 to 0.95, n has a value of 0.05 to 0.95, p has a value of 0.05 to 0.95, q has a value of 0.01 to 0.30 and m+n+p+q≈1.