The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2010
Filed:
Oct. 06, 2006
Applicants:
Kenneth E. Gonsalves, Concord, NC (US);
Mingxing Wang, Charlotte, NC (US);
Inventors:
Kenneth E. Gonsalves, Concord, NC (US);
Mingxing Wang, Charlotte, NC (US);
Assignee:
The University of North Carolina at Charlotte, Charlotte, NC (US);
Primary Examiner:
Int. Cl.
CPC ...
G03C 1/73 (2006.01); G03F 7/004 (2006.01); G03F 7/029 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to photoacid generating compounds, lithographic resists comprising photoacid generating compounds, and to various lithographic processes techniques, and applications. In one embodiment, the present invention provides a photoacid generator of Formula (I):