The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2010
Filed:
Jul. 09, 2007
Applicants:
Hak Kim, Yongin-si, KR;
Jun-young Jang, Suwon-si, KR;
Inventors:
Hak Kim, Yongin-si, KR;
Jun-Young Jang, Suwon-si, KR;
Assignee:
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 27/72 (2006.01); G03B 27/32 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a method of exposing a substrate to light and an apparatus for performing the method, a first optical unit configured to generate at least two lights and including a photomask, the at least two lights having pattern information of the photomask, and a second optical unit configured to direct the at least two lights along different paths and onto a substrate.