The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2010
Filed:
Aug. 06, 2007
Takashi Sakoh, Kanagawa, JP;
Mami Toda, Kanagawa, JP;
Takashi Sakoh, Kanagawa, JP;
Mami Toda, Kanagawa, JP;
NEC Electronics Corporation, Kanagawa, JP;
Abstract
In a conventional semiconductor device, an excessive etching occurs in a section where an opening for contact plug is formed, causing a damage to a diffusion layer located under the opening. A semiconductor deviceincludes a region Dfor forming an electric circuit, and a seal ring(guard ring) that surrounds the region Dfor forming the electric circuit. A DRAMis formed in the region Dfor forming the electric circuit. Interlayer insulating filmsandare formed on a semiconductor substrate. The seal ringis formed in the interlayer insulating filmsand, and at least a portion there of is located spaced apart from the semiconductor substrate