The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2010
Filed:
Dec. 03, 2008
Teruhiko Kumada, Hyogo, JP;
Hideharu Nobutoki, Neyagawa, JP;
Tetsuya Yamamoto, Nishinomiya, JP;
Takuya Kamiyama, Takatsuki, JP;
Teruhiko Kumada, Hyogo, JP;
Hideharu Nobutoki, Neyagawa, JP;
Tetsuya Yamamoto, Nishinomiya, JP;
Takuya Kamiyama, Takatsuki, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Nippon Shokubai Co., Ltd., Osaka, JP;
Abstract
A low dielectric material is produced by using a composition including a borazine ring-containing compound and a compound represented by the following formula as a solvent, and/or by annealing a composition comprising a borazine ring-containing compound under atmosphere of oxygen concentration not higher than 0.1 vol % at 200 to 600° C. In the following formula, Rand Rindependently represent alkyl group or acyl group; Rrepresents hydrogen atom or alkyl group; and n represents an integer of 1 to 5.