The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2010
Filed:
Feb. 24, 2004
Vijay D. Parkhe, San Jose, CA (US);
Kurt J. Ahmann, San Jose, CA (US);
Matthew C. Tsai, Cupertino, CA (US);
Steve Sansoni, Livermore, CA (US);
Vijay D. Parkhe, San Jose, CA (US);
Kurt J. Ahmann, San Jose, CA (US);
Matthew C. Tsai, Cupertino, CA (US);
Steve Sansoni, Livermore, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A substrate support has a support structure and a coating on the support structure having a carbon-hydrogen network. The coating has a contact surface having a coefficient of friction of less than about 0.3 and a hardness of at least about 8 GPa. The contact surface of the coating is capable of reducing abrasion and contamination of a substrate that contacts the contact surface. In one version, the support structure has a dielectric covering an electrode. A plurality of mesas on the dielectric have a coating with the contact surface thereon.