The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2010
Filed:
Feb. 25, 2008
Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
Naoki Watanabe, Tokyo, JP;
Nobuyoshi Watanabe, Tokyo, JP;
Kazunori Tani, Tokyo, JP;
Shinji Furukawa, Tokyo, JP;
Hiromi Sasaki, Tokyo, JP;
Osamu Watabe, Tokyo, JP;
Naoki Watanabe, Tokyo, JP;
Nobuyoshi Watanabe, Tokyo, JP;
Kazunori Tani, Tokyo, JP;
Shinji Furukawa, Tokyo, JP;
Hiromi Sasaki, Tokyo, JP;
Osamu Watabe, Tokyo, JP;
Canon Anelva Corporation, Tokyo, JP;
Abstract
An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.