The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2010
Filed:
Sep. 27, 2007
Robert L. Baan, Wallkill, NY (US);
Carla A. Bailey, Poughkeepsie, NY (US);
Vladimir Jambrih, Kingston, NY (US);
Robert P. Katz, Lagrangeville, NY (US);
Robert L. Baan, Wallkill, NY (US);
Carla A. Bailey, Poughkeepsie, NY (US);
Vladimir Jambrih, Kingston, NY (US);
Robert P. Katz, Lagrangeville, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Apparatus for Scanning Acoustic Microscopy (SAM) of a semiconductor device including a substrate with an acoustic probe, The substrate has upper and lower surfaces. A sealed lower space provides an environment surrounding the lower surface. An upper ring structure formed above the upper surface includes an upper sealing ring in contact with the upper surface, with the upper sealing structure and the seal forming a dam for retaining the acoustic transmission fluid above the upper surface. A fixture base retains a lower sealing ring in contact with the lower surface surrounding the lower surface. An acoustic scanning probe positioned confronting the upper surface of the semiconductor device extending into the acoustic transmission fluid retained in contact with the upper surface.