Sample traveling stage with flexure mechanism module to absorb the deformation of the slide

Abstract

A sample traveling stage is used for inspection equipment or precision processing equipment for semiconductors or FPDs, (Flat Panel Displays). The sample traveling stage includes a moving part in which a first slide, which is mounted on a base frame and moves along a first guide block, and a second slide, which is mounted on the first slide and moves along a second guide block, is installed in a mutually crossing direction. A traveling part that travels sample through the sample table is installed by a flexure mechanism module formed on the second slide and measures displacement through the X, Y bar mirror installed at the above sample table in a mutually vertical direction. A measuring part includes a laser head, a beam divider, and an interferometer installed at the operating path of the moving part forms the output into a displacement signal by receiving the input beam interference signal reflected by the X, Y bar mirror from receiver. The deformation error of the mirror and sample, including the sample table, decreases because deformation by the slide is not delivered to the sample table, and measuring accuracy improves because the relative distance of the mirror and the sample is set. Productivity improves due to the minimization of defective proportions because the accuracy is improved.