The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 26, 2010

Filed:

Apr. 21, 2009
Applicants:

Shigenori Suzuki, Toyoake, JP;

Hisanori Yokura, Obu, JP;

Kenichi Yokoyama, Nagoya, JP;

Tetsuo Fujii, Toyohashi, JP;

Kazuhiko Sugiura, Nagoya, JP;

Inventors:

Shigenori Suzuki, Toyoake, JP;

Hisanori Yokura, Obu, JP;

Kenichi Yokoyama, Nagoya, JP;

Tetsuo Fujii, Toyohashi, JP;

Kazuhiko Sugiura, Nagoya, JP;

Assignee:

Denso Corporation, Kariya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/14 (2006.01); H01L 29/82 (2006.01); H01L 29/84 (2006.01);
U.S. Cl.
CPC ...
Abstract

A physical quantity sensor includes: a sensor substrate including a first support substrate, a first insulation film and a first semiconductor layer, which are stacked in this order; a cap substrate including a second support substrate disposed on the first semiconductor layer, and has a P conductive type; and multiple electrodes, which are separated from each other. The first support substrate, the first insulation film and the first semiconductor layer have the P conductive type. The physical quantity is detected based on a capacitance between the plurality of electrodes, and the electrodes are disposed in the first semiconductor layer.


Find Patent Forward Citations

Loading…