The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2010
Filed:
May. 25, 2007
Applicants:
Katsura Miyashita, Kanagawa, JP;
Yoshiaki Toyoshima, Chiba, JP;
Inventors:
Katsura Miyashita, Kanagawa, JP;
Yoshiaki Toyoshima, Chiba, JP;
Assignee:
Kabushiki Kaisha Toshiba, Minato-ku, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/82 (2006.01);
U.S. Cl.
CPC ...
Abstract
An electrical fuse (eFuse) has a gate prepared from a conductive or partially conductive material such as polysilicon, a semiconductor substrate having a pipe region in proximity to the gate, and first and second electrode regions adjacent the pipe region. A metal silicide layer is provided on the semiconductor substrate adjacent the pipe region. When a programming voltage is applied, the metal silicide undergoes a thermally induced phase transition in the pipe region. The eFuse has improved reliability and can be programmed with relatively low voltages.