The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2010
Filed:
Dec. 30, 2005
Jinhee Yun, Gyeongbuk, KR;
Munik NA, Gwangju, KR;
Seunglyul Lee, Gyeongbuk, KR;
Kyoungshik Kim, Gyeongbuk, KR;
Junhyung Park, Seoul, KR;
Sanghyo Park, Busan, KR;
Jaehoon Choi, Seoul, KR;
Kagkyu Jung, Gyeonggi-do, KR;
Jaekwang Kim, Seoul, KR;
Jinhee Yun, Gyeongbuk, KR;
Munik Na, Gwangju, KR;
Seunglyul Lee, Gyeongbuk, KR;
Kyoungshik Kim, Gyeongbuk, KR;
Junhyung Park, Seoul, KR;
Sanghyo Park, Busan, KR;
Jaehoon Choi, Seoul, KR;
Kagkyu Jung, Gyeonggi-do, KR;
Jaekwang Kim, Seoul, KR;
LG Display Co., Ltd., Seoul, KR;
Abstract
A sputtering apparatus includes a container; a plate for supporting the container; a first attachment for attaching the container to the plate; and a second attachment for less tightly attaching the container to the plate than through the first attachment.