The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2010
Filed:
May. 25, 2006
Masaaki Ito, Tsuchiura, JP;
Yukinori Nakayama, Toride, JP;
Tatsuharu Yamamoto, Ryugasaki, JP;
Hiroaki Imai, Ryugasaki, JP;
Masaaki Ito, Tsuchiura, JP;
Yukinori Nakayama, Toride, JP;
Tatsuharu Yamamoto, Ryugasaki, JP;
Hiroaki Imai, Ryugasaki, JP;
Hitachi Plant Technologies, Ltd., Tokyo, JP;
Abstract
A bonding apparatus, suitable for accurately bonding large substrates for a liquid crystal display, includes Z-axis drive mechanisms, and upper and lower chambers. The Z-axis drive mechanisms for moving an upper frame vertically are disposed at four corners of a mount. The upper chamber is supported by the upper frame and has an upper table inside. The lower chamber has a lower table inside and is supported on the mount. The upper and lower chambers are united through a seal ring to define a vacuum chamber. Moving the upper frame moves the upper chamber vertically to open or close the vacuum chamber. The lower table is supported via a free joint stage between the plurality of support legs and the table, and is moved horizontally by a side thrust mechanism disposed outside of the vacuum chamber.