The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2010
Filed:
Jul. 05, 2006
Helen Lai WA Chan, Hong Kong, CN;
Tin Yan Lam, Hong Kong, CN;
Chen Chao, Hong Kong, CN;
Kin Wing Kwok, Hong Kong, CN;
Helen Lai Wa Chan, Hong Kong, CN;
Tin Yan Lam, Hong Kong, CN;
Chen Chao, Hong Kong, CN;
Kin Wing Kwok, Hong Kong, CN;
The Hong Kong Polytechnic University, Hong Kong, CN;
Abstract
An apparatus and method for detecting the oscillation amplitude of a bonding tool includes a sensing unit disposed adjacent to and at a distance from the bonding tool. The sensing unit includes a pair of electrodes, a piezoelectric sensing layer located between the pair of electrodes, and a membrane associated with the piezoelectric sensing layer. The piezoelectric sensing layer becomes sensitive to ultrasonic vibrations and generates electrical voltage signals after being activated by a poling process. An optional pre-amplifier is used to amplify the signals generated from the sensing unit, and an oscilloscope is used to further process the signals.