The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2010
Filed:
Dec. 21, 2007
Toshihiko Omi, Chiba, JP;
Yoichi Mimuro, Chiba, JP;
Toshihiko Omi, Chiba, JP;
Yoichi Mimuro, Chiba, JP;
Seiko Instruments Inc., Chiba, JP;
Abstract
A plurality of line image sensor ICsare formed to be arranged in X, Y directions with gaps therebetween on a semiconductor substrate. The gaps between the line image sensor ICsbecome scribe linesX,Y. A pattern of dummy interconnectsis formed in a region where a short sideS of an arbitrary line image sensor ICis opposed to a short sideS of another line image sensor ICadjacent to the arbitrary line image sensor ICin the X direction in a region where the scribe lineY is formed. When a material gas is generated by plasma CVD, the material gas is uniformly deposited not only on the line image sensor ICs, but also on the dummy interconnects. Consequently, a protective film with a uniform thickness can be formed on the line image sensor ICs