The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2010
Filed:
Apr. 16, 2008
Masahiro Yamamoto, Osaka, JP;
Takeshi Koiwasaki, Osaka, JP;
Hitoshi Yamanishi, Osaka, JP;
Isao Muragishi, Osaka, JP;
Mitsuhiro Yoshinaga, Osaka, JP;
Masahiro Yamamoto, Osaka, JP;
Takeshi Koiwasaki, Osaka, JP;
Hitoshi Yamanishi, Osaka, JP;
Isao Muragishi, Osaka, JP;
Mitsuhiro Yoshinaga, Osaka, JP;
Panasonic Corporation, Osaka, JP;
Abstract
Provided is a partial pressure measuring method and a partial pressure measuring apparatus by which a partial pressure distribution is easily measured in a vacuum chamber. The partial pressure measuring method and the partial pressure measuring apparatus includes: moving a local plasma source dedicated to partial pressure measuring provided in the vacuum chamber, to a location at which the measuring is to be performed; and measuring a partial pressure distribution in the vacuum chamber, by receiving emission of plasma generated by the local plasma source through a window which is formed in a wall part of the vacuum chamber and through which the emission passes, and thereby performing emission spectral analysis on intensity of the emission.