The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2010
Filed:
Sep. 29, 2006
Chung-ho Huang, San Jose, CA (US);
Hae-pyng Jea, Palo Alto, CA (US);
Tung Hsu, Fremont, CA (US);
Jackie Seto, Mountain View, CA (US);
Chung-Ho Huang, San Jose, CA (US);
Hae-Pyng Jea, Palo Alto, CA (US);
Tung Hsu, Fremont, CA (US);
Jackie Seto, Mountain View, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A computer-implemented method for facilitating plasma processing tool component management across plurality of tools is provided. The method includes receiving first component data for first plurality of components, including identification and usage history, at first database associated with first tool. The method also includes receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The method further includes synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools. The method yet also includes obtaining information, using rules and usage history data about given component prior to performing one of replacement, analysis, and maintenance.