The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2010
Filed:
Mar. 06, 2007
Satoshi Sakai, Yokohama, JP;
Shigenori Tsuruga, Yokohama, JP;
Hideo Yamakoshi, Yokohama, JP;
Shizuma Kuribayashi, Yokohama, JP;
Minoru Danno, Yokohama, JP;
Hiroshi Futami, Yokohama, JP;
Noriko Yamazaki, Yokohama, JP;
Satoshi Sakai, Yokohama, JP;
Shigenori Tsuruga, Yokohama, JP;
Hideo Yamakoshi, Yokohama, JP;
Shizuma Kuribayashi, Yokohama, JP;
Minoru Danno, Yokohama, JP;
Hiroshi Futami, Yokohama, JP;
Noriko Yamazaki, Yokohama, JP;
Mitsubishi Heavy Industries, Ltd., Tokyo, JP;
Abstract
An optical system includes a fluoride compound and has surfaces facing and exposed to plasma installed in an optical equipment which has an inner zone where the plasma exists. A 2 nm-20 nm protective film of a highly plasma-resistant material is formed on the surface of the fluoride compound that is exposed to the plasma.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile