The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 12, 2010

Filed:

Feb. 20, 2006
Applicants:

Maxim Zalalutdinov, Silver Springs, MD (US);

Robert B. Reichenbach, Ithaca, NY (US);

Keith Aubin, Freeville, NY (US);

Brian H. Houston, Fairfax, VA (US);

Jeevak M. Parpia, Ithaca, NY (US);

Harold G. Craighead, Ithaca, NY (US);

Inventors:

Maxim Zalalutdinov, Silver Springs, MD (US);

Robert B. Reichenbach, Ithaca, NY (US);

Keith Aubin, Freeville, NY (US);

Brian H. Houston, Fairfax, VA (US);

Jeevak M. Parpia, Ithaca, NY (US);

Harold G. Craighead, Ithaca, NY (US);

Assignees:

Cornell Research Foundation, Inc., Ithaca, NY (US);

Navel Research Laboratory, Washington, DC (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H02N 10/00 (2006.01); H01L 41/04 (2006.01);
U.S. Cl.
CPC ...
Abstract

A micromechanical resonator is formed on a substrate. The resonator has a partial spherical shell clamped on an outside portion of the shell to the substrate. In other embodiments, a flat disc or other shape may be used. Movement is induced in a selected portion of the disc, inducing easily detectible out-of-plane motion. A laser is used in one embodiment to heat the selected portion of the disc and induce the motion. The motion may be detected by capacitive or interferometric techniques.


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