The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2010
Filed:
Dec. 31, 2007
Toshihiro Morisawa, Kanagawa, JP;
Andrew C. Walker, Carmel, CA (US);
Yeak-chong Wong, San Jose, CA (US);
Toshihiro Morisawa, Kanagawa, JP;
Andrew C. Walker, Carmel, CA (US);
Yeak-Chong Wong, San Jose, CA (US);
Hitachi Global Technologies Netherlands B.V., Amsterdam, NL;
Abstract
An advanced process control (APC) system. The APC system comprises a database for receiving process data from a measurement tool for a plurality of process runs and for storing the process data. A lambda tuner determines a tuned-lambda value corresponding to a process-capability-index value based on upper and lower process control limits and statistics derived from the process data. A process-run controller updates a recipe value based on the received process data and the tuned-lambda value.