The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2010
Filed:
Mar. 10, 2006
Günter Klemm, Nidda, DE;
Andreas Thiede, Dresden-Schonborn, DE;
Hans-jürgen Schneider, Wachtersbach, DE;
Günter Klemm, Nidda, DE;
Andreas Thiede, Dresden-Schonborn, DE;
Hans-Jürgen Schneider, Wachtersbach, DE;
Applied Materials GmbH & Co. KG, Alzenau, DE;
ALD Vacuum Technologies GmbH, Hanau, DE;
Abstract
An arrangement for the regulation of the electron beam power of an electron gun, which comprises a filament cathode, a block cathode and an anode. Between the filament cathode and the block cathode is applied a first voltage, while between the block cathode and the anode a second voltage is applied. With the aid of a first closed-loop regulated system the filament cathode is regulated to a constant current value, which has a filament temperature sufficient for the maximum beam power of the block cathode. A second closed-loop regulated system, such including a block power regulator, which is acted upon by the difference between instantaneous block power value and nominal block power value, regulates the voltage between the filament cathode and the block cathode.