The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2010
Filed:
May. 02, 2007
Applicant:
Takahiro Kumakawa, Kyoto, JP;
Inventor:
Takahiro Kumakawa, Kyoto, JP;
Assignee:
Panasonic Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a semiconductor substrate, a plurality of semiconductor elementshaving diaphragm structures are formed in the form of cells in the longitudinal direction and the lateral direction, and V-groovesare formed by anisotropic etching continuously on only division linesparallel formed in one direction, out of the division lineswhich are orthogonal to each other and divide the respective semiconductor elementsindividually.