The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2010
Filed:
Sep. 03, 2008
Joachim Zach, Oestringen, DE;
Harald Rose, Darmstadt, DE;
Joachim Zach, Oestringen, DE;
Harald Rose, Darmstadt, DE;
CEOS Corrected Electron Optical Systems GmbH, Heidelberg, DE;
Abstract
A corrector () for the axial and off-axial beam path of a particle-optical system, comprises a first () and a second () correction piece, which are disposed one behind the other in the beam path () on an optical axis (). Each correction piece () comprises four successive multipole elements () disposed symmetrically with respect to a center plane () and with the following fields: wherein the first () and the fourth () multipole elements of the multipole elements () are used to generate quadrupole fields (') and the second () and third () are used to generate octupole fields (′″) and quadrupole fields (′), wherein the latter are superposed magnetic () and electric fields (″), wherein the quadrupole fields (′) of all four multipole elements () are rotated from one to the next through 90°. An astigmatism of third order is corrected by a central multipole element disposed in the center plane and generating an octupole field.