The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2010
Filed:
Apr. 30, 2007
Chungho Lee, Sunnyvale, CA (US);
Huaqiang Wu, Mountain View, CA (US);
Wai Lo, Palo Alto, CA (US);
Hiroyuki Kinoshita, San Jose, CA (US);
Chungho Lee, Sunnyvale, CA (US);
Huaqiang Wu, Mountain View, CA (US);
Wai Lo, Palo Alto, CA (US);
Hiroyuki Kinoshita, San Jose, CA (US);
Spansion LLC, Sunnyvale, CA (US);
Abstract
A method of replacing a top oxide around a storage element of a memory device is provided. The method can involve removing a core first poly and core first top oxide in a core region while not removing a periphery first poly in a periphery region on a semiconductor substrate; forming a second top oxide around a storage element in the core region and on the periphery first poly in the periphery region; forming a second poly over the semiconductor substrate in both the core and periphery regions; removing the second poly and second top oxide in the periphery region; and forming a third poly on the semiconductor substrate in both the core and periphery regions.