The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2010
Filed:
Dec. 05, 2006
Applicants:
Greg Thomas Dunne, Rexford, NY (US);
Jesse Berkley Tucker, Schenectady, NY (US);
Stanislav Ivanovich Soloviev, Albany, NY (US);
Zachary Matthew Stum, Niskayuna, NY (US);
Inventors:
Greg Thomas Dunne, Rexford, NY (US);
Jesse Berkley Tucker, Schenectady, NY (US);
Stanislav Ivanovich Soloviev, Albany, NY (US);
Zachary Matthew Stum, Niskayuna, NY (US);
Assignee:
General Electric Company, Niskayuna, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/22 (2006.01); H01L 21/38 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for doping impurities into a device layer includes providing a carbonized dopant layer including one or more dopant impurities over a device layer and heat treating the carbonized dopant layer to thermally diffuse the dopant impurities into the device layer.