The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2010
Filed:
Jun. 02, 2006
Renata Melamud, Menlo Park, CA (US);
Bongsang Kim, Mountain View, CA (US);
Matt Hopcroft, San Francisco, CA (US);
Saurabh Chandorkar, Stanford, CA (US);
Manu Agarwal, Stanford, CA (US);
Thomas W. Kenny, San Carlos, CA (US);
Renata Melamud, Menlo Park, CA (US);
Bongsang Kim, Mountain View, CA (US);
Matt Hopcroft, San Francisco, CA (US);
Saurabh Chandorkar, Stanford, CA (US);
Manu Agarwal, Stanford, CA (US);
Thomas W. Kenny, San Carlos, CA (US);
The Board of Trustees of the Leland Stanford Junior University, Palo Alto, CA (US);
Abstract
Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.