The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2010
Filed:
Jun. 01, 2007
Toan Q. Tran, San Jose, CA (US);
Dimitry Lubormirsky, Cupertino, CA (US);
Lun Tsuei, Mountain View, CA (US);
Won Bang, Gilroy, CA (US);
Toan Q. Tran, San Jose, CA (US);
Dimitry Lubormirsky, Cupertino, CA (US);
Lun Tsuei, Mountain View, CA (US);
Won Bang, Gilroy, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of a valve assembly for a process chamber having improved seal performance are provided herein. In some embodiments, a valve assembly for a process chamber includes a housing having an opening disposed in a wall thereof and through which a substrate may be transferred; a door movably coupled to the housing in a plane substantially parallel to the wall of the housing for selectively sealing the opening; a compressible sealing member disposed at least partly between an upper surface of the door and a corresponding surface of the housing for forming a seal therebetween by compression of the compressible sealing member in a direction substantially perpendicular to the wall when the door is in a closed position; and a mechanism for restricting the exposure of the compressible sealing member to an environment on a process chamber side of the housing.