The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2010
Filed:
Feb. 20, 2007
Delrae H. Gardner, Tualatin, OR (US);
Craig C. Ramsey, West Linn, OR (US);
Dana L Patelzick, West Linn, OR (US);
DelRae H. Gardner, Tualatin, OR (US);
Craig C. Ramsey, West Linn, OR (US);
Dana L Patelzick, West Linn, OR (US);
CyterOptics Semiconductor, Inc., Wilsonviller, OR (US);
Abstract
A wireless sensor includes at least one capacitive plate for sensing a distance relative to an object of interest within a semiconductor-processing environment. The sensor includes an internal power source and wireless communication such that distance and/or parallelism measurements effected using the capacitive plate(s) can be provided wirelessly to an external device.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile