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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7804148 B1

PDFFull Text
Expired
Date of Patent:
Sep. 28, 2010

Filed:

Feb. 16, 2006

Opto-thermal mask including aligned thermal dissipative layer, reflective layer and transparent capping layer

Applicants:

Louis L. Hsu, Fishkill, NY (US);

Jack A. Mandelman, Flat Rock, NC (US);

Chandrasekhar Narayan, San Jose, CA (US);

Chun-yung Sung, Poughkeepsie, NY (US);

Inventors:

Louis L. Hsu, Fishkill, NY (US);

Jack A. Mandelman, Flat Rock, NC (US);

Chandrasekhar Narayan, San Jose, CA (US);

Chun-Yung Sung, Poughkeepsie, NY (US);

Assignee:

International Business Machines Corporation, Armonk, NY (US);

Attorneys:

Thomas A. Beck

Daniel P. Morris

Primary Examiner:

Phat X Cao

Assistant Examiner:

Diana C Garrity

Int. Cl.
CPC ...
H01L 23/58 (2006.01); H01L 31/058 (2006.01); H01L 31/02 (2006.01); H01L 31/0232 (2006.01); H01L 31/024 (2006.01); H01L 21/033 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An opto-thermal annealing mask stack layer includes a thermal dissipative layer located over a substrate. A reflective layer is located upon the thermal dissipative layer. A transparent capping layer, that may have a thickness from about 10 to about 100 angstroms, is located upon the reflective layer. The opto-thermal annealing mask layer may be used as a gate electrode within a field effect device.

Find Patent Forward Citations

Hsu, Louis. (2010). Opto-thermal mask including aligned thermal dissipative layer, reflective layer and transparent capping layer (U.S. Patent No. 7804148). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7804148

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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