The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2010
Filed:
Jun. 18, 2007
Jiping LI, Palo Alto, CA (US);
Bruce E. Adams, Portland, OR (US);
Timothy N. Thomas, Portland, OR (US);
Aaron Muir Hunter, Santa Cruz, CA (US);
Abhilash J. Mayur, Salinas, CA (US);
Rajesh S. Ramanujam, San Jose, CA (US);
Jiping Li, Palo Alto, CA (US);
Bruce E. Adams, Portland, OR (US);
Timothy N. Thomas, Portland, OR (US);
Aaron Muir Hunter, Santa Cruz, CA (US);
Abhilash J. Mayur, Salinas, CA (US);
Rajesh S. Ramanujam, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In a laser annealing system for workpieces such as semiconductor wafers, a pyrometer wavelength response band is established within a narrow window lying between the laser emission band and a fluorescence emission band from the optical components of the laser system, the pyrometer response band lying in a wavelength region at which the optical absorber layer on the workpiece has an optical absorption coefficient as great as or greater than the underlying workpiece. A multi-layer razor-edge interference filter having a 5-8 nm wavelength cut-off edge transition provides the cut-off of the laser emission at the bottom end of the pyrometer response band.