The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2010
Filed:
Aug. 14, 2007
Gerd Brueckner, Boxdorf, DE;
Arthur Deutschlaender, Kleinmachnow, DE;
Harald Heinrich, Dresden, DE;
Germar Schneider, Dresden, DE;
Steffen Schroeder, Franzburg, DE;
Gerd Brueckner, Boxdorf, DE;
Arthur Deutschlaender, Kleinmachnow, DE;
Harald Heinrich, Dresden, DE;
Germar Schneider, Dresden, DE;
Steffen Schroeder, Franzburg, DE;
Qimonda AG, Munich, DE;
Abstract
A method and apparatus for handling an article in semiconductor fabrication in which the article is completely separated from a gripper by a frozen liquid. The gripper includes a feeding device for introducing a liquid such as a high-purity water or a decontaminating liquid. The gripper also includes a cooling device for freezing the liquid. A suction take-in device applies negative pressure to hold the article against the frozen liquid.