The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2010
Filed:
Sep. 06, 2007
Nam-young Lee, Yongin-si, KR;
Pil-woong Bang, Seoul, KR;
Yeong-lyeol Park, Yongin-si, KR;
Samsung Electronics Co., Ltd., Suwon-Si, KR;
Abstract
Disclosed are a method of managing a process and a process managing system in which a failure-generating process step can be quickly detected. The method of managing a process includes sequentially performing first to n-th (n is a natural number) process steps with respect to a plurality of wafers, the order that the plurality of wafers are processed in each of the n process steps are different from one another. Calculating characteristic parameter values for the plurality of wafers, calculating first to n-th relations that indicate relationships between the first to n-th process orders and the characteristic parameter values, performing a Fourier transform on the first to n-th relations so as to calculate first to n-th conversion relations, and determining the existence of patterns among the first to n-th relations using the first to n-th conversion relations.
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