The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 21, 2010

Filed:

May. 08, 2006
Applicant:

Erik Jan Lous, Veldhoven, NL;

Inventor:

Erik Jan Lous, Veldhoven, NL;

Assignee:

NXP B.V., Eindhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/00 (2006.01); G03B 27/42 (2006.01);
U.S. Cl.
CPC ...
Abstract

The spatial light modulator device (SLM) for providing a spatial light pattern which is alterable in response to an electric signal comprises a first modulator element (ME) and a second modulator element (ME). The first light beam (LB) processed by the first modulator element (ME) and the second light beam (LB) processed by the second modulator element (ME) can be superimposed for forming the spatial light pattern. In this way a defect in the first modulator element (ME) can be compensated a corresponding pixel of the second modulator element (ME). The spatial light pattern provided by the first modulator element (ME) and the second modulator element (ME) are complementary and combine to the desired spatial light pattern. The spatial light modulator device (SLM) may be used in a lithography apparatus (LA) or a display device (DD).


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