The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2010
Filed:
Jun. 25, 2004
Giosuè Caliano, Rome, IT;
Alessandro Caronti, Rome, IT;
Riccardo Carotenuto, Rome, IT;
Massimo Pappalardo, Rome, IT;
Giosuè Caliano, Rome, IT;
Alessandro Caronti, Rome, IT;
Riccardo Carotenuto, Rome, IT;
Massimo Pappalardo, Rome, IT;
Esaote S.p.A., Casale, Monferrato, IT;
Abstract
The invention relates to a microfabricated capacitive ultrasonic transducer () comprising at least one thin plate (), provided with a metallization (), suspended over a conductive substrate () through supporting elements integrally coupled to the conductive substrate (), the conductive substrate () forming one or more electrodes corresponding to said at least one thin plate (), characterized in that said supporting elements comprise an ordered arrangement of columns or 'pillars' () to which the thin plate () is integrally coupled, whereby the pillars () operate as substantially punctiform constraints. The invention further relates to a surface micro-mechanical process for fabricating such microfabricated capacitive ultrasonic transducers ().