The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2010
Filed:
Jul. 27, 2007
Ji-ho Hong, Gyeonggi-do, KR;
Ji-Ho Hong, Gyeonggi-do, KR;
Dongbu HiTek Co., Ltd., Seoul, KR;
Abstract
A test module for measuring electrical characteristics of a semiconductor device includes a plurality of shallow trench isolation (STI) layers formed over a semiconductor substrate. An active area includes not only an extended part enclosing the STI layers but also a plurality of minute line-width parts isolated by the STI layers. A gate oxide layer is formed over the STI layers and the active area. A gate electrode is formed over the STI layers and the minute line-width parts of the active area with interposing the gate oxide layer. An interlayer insulating layer, a metal wiring layer, a contact plug, and test pads allow non-destructive testing of the semiconductor device.