The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 21, 2010

Filed:

Jun. 29, 2007
Applicants:

Choong Keun Yoo, Anyang-si, KR;

AE Kyung Jeon, Seoul, KR;

Inventors:

Choong Keun Yoo, Anyang-si, KR;

Ae Kyung Jeon, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An attaching device and a method of manufacturing a light emitting device using the same are provided. The attaching device includes a process chamber, first and second supporters, and an open-close valve. The first and second supporters are disposed inside the process chamber to safely load and fix substrates. The open-close valve is disposed at a predetermined area of the process chamber to control a pressure inside the process chamber by opening and closing the process chamber. At least one of the first and second substrate supporters includes an electro static chuck including more than two of electrodes having different polarities and a polarity inverting unit for inverting polarities of the electrodes.


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