The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2010
Filed:
Nov. 12, 2004
Michael R. Rice, Pleasanton, CA (US);
Eric A. Englhardt, Palo Alto, CA (US);
Robert B. Lowrance, Los Gatos, CA (US);
Martin R. Elliott, Round Rock, TX (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Eric A. Englhardt, Palo Alto, CA (US);
Robert B. Lowrance, Los Gatos, CA (US);
Martin R. Elliott, Round Rock, TX (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In a first aspect, a first apparatus is provided for inter-station overhead transport of a substrate carrier. The first apparatus includes (1) an overhead transport mechanism; (2) a substrate carrier support suspended from the overhead transport mechanism and adapted to receive and support a substrate carrier; and (3) a stabilization apparatus adapted to limit rocking of the substrate carrier and substrate carrier support relative to the overhead transport mechanism. Numerous other aspects are provided.