The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2010
Filed:
Nov. 26, 2004
Hiroyuki Kotani, Osaka, JP;
Hirotaki Takei, Osaka, JP;
Yoshifumi Ibuki, Osaka, JP;
Hiroaki Oichi, Osaka, JP;
Hiroyuki Kotani, Osaka, JP;
Hirotaki Takei, Osaka, JP;
Yoshifumi Ibuki, Osaka, JP;
Hiroaki Oichi, Osaka, JP;
DAIHEN Corporation, Osaka, JP;
Abstract
A high-frequency power supply system includes an anomaly detectorwhich detects an anomaly occurring in a circuit on the side of a load L as from an outputting end A of a high-frequency power source. The anomaly detectorincludes a first detectorwhich detects a voltage value Vf of a high-frequency forward wave, a second detectorwhich detects a voltage value Vr of a high-frequency reflected wave, a reflection coefficient calculatorand a differentiatorwhich calculate a reflection coefficient differential value dΓ/dt from the forward wave voltage value Vf and the reflected wave voltage value Vr, and an anomaly determinerwhich determines of an occurrence of an anomaly based on the reflection coefficient differential value dΓ/dt. When the anomaly detectoroutputs an anomaly detection signal to the high-frequency power source, high-frequency power sourcestops its power output operation.