The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2010
Filed:
Mar. 25, 2008
Motohiro Kono, Kyoto, JP;
Toshikazu Kitajima, Kyoto, JP;
Kazuhiko Fuse, Kyoto, JP;
Yoshiyuki Nakazawa, Kyoto, JP;
Motohiro Kono, Kyoto, JP;
Toshikazu Kitajima, Kyoto, JP;
Kazuhiko Fuse, Kyoto, JP;
Yoshiyuki Nakazawa, Kyoto, JP;
Dainippon Screen Mgf. Co., Ltd., Kyoto, JP;
Abstract
In a surface voltmeter (), a surface voltage on a measurement area on a semiconductor substrate () on which an insulating film is formed is measured while applying light to the measurement area. With this operation, a voltage induced on a main body of the substrate () by charge which is charged on a surface of the insulating film is balanced out. Consequently, it is possible to measure a surface voltage on the measurement area with high accuracy. Since an electrode wiring () used for application of an electrode voltage to an electrode () extends from the electrode () in a direction away from the substrate () along a vibration direction, it is possible to prevent influences of noises caused by vibration of the electrode wiring () in vibrating the electrode () and to measure the surface voltage on the measurement area more accurately.