The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2010
Filed:
Aug. 16, 2007
Sang-mi Lee, Gyeonggi-do, KR;
Kwang-shin Lim, Gyeonggi-do, KR;
Jung-dae Park, Seoul, KR;
Tae-hyo Choi, Gyeonggi-do, KR;
Sang-Mi Lee, Gyeonggi-do, KR;
Kwang-Shin Lim, Gyeonggi-do, KR;
Jung-Dae Park, Seoul, KR;
Tae-Hyo Choi, Gyeonggi-do, KR;
Abstract
In a composition for removing a polymeric contaminant that may remain on an apparatus for manufacturing a semiconductor device and a method of removing a polymeric contaminant using the composition, the composition includes from about 5 to 10 percent by weight of a fluoride salt, from about 5 to 15 percent by weight of an acid or a salt thereof, and from about 75 to 90 percent by weight of an aqueous solution of glycol. The composition can effectively remove the polymeric contaminant from the apparatus within a relatively short period of time, and suppress damages to parts of the apparatus.