The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2010
Filed:
Nov. 29, 2004
Applicants:
Elvis M. Chan, Rocklin, CA (US);
Bradley S. Withers, Folsom, CA (US);
Inventors:
Elvis M. Chan, Rocklin, CA (US);
Bradley S. Withers, Folsom, CA (US);
Assignee:
Renesas Electronics America Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3205 (2006.01); H01L 21/304 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for improving the reliability of integrated circuits. In one embodiment, the method includes forming a dielectric layer on a semiconductor wafer. A trench is then formed in the dielectric. Thereafter, a conductive interconnect is formed within the trench, wherein the conductive interconnect comprises copper. The conductive interconnect is then etched using an acidic solution. Lastly, a conductive layer is formed on an exposed surface of the etched conductive interconnect.