The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 14, 2010

Filed:

Dec. 14, 2006
Applicants:

Stefan Eckert, Dresden, DE;

Klaus Goller, Dresden, DE;

Hermann Wendt, Poughkeepsie, NY (US);

Inventors:

Stefan Eckert, Dresden, DE;

Klaus Goller, Dresden, DE;

Hermann Wendt, Poughkeepsie, NY (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention relates to a method for producing a layer arrangement. An electrically conductive layer is formed and patterned. A sacrificial layer formed on at least part of the patterned electrically conductive layer. An electrically insulating layer is formed on the electrically conductive and sacrificial layers and is patterned in such a manner that one or more surface areas of the sacrificial layer are exposed. The exposed areas of the sacrificial layer are removed to expose one or more surface areas of the patterned electrically conductive layer. The patterned electrically conductive layer is covered with a pattern of electrically conductive material.


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