The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2010
Filed:
Dec. 11, 2008
Applicant:
Kotaro Nomura, Toyama, JP;
Inventor:
Kotaro Nomura, Toyama, JP;
Assignee:
Panasonic Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract
By covering inner surfaces of a wiring grooveand a via holewith a fourth insulation filmcontaining porogen during a manufacturing process of a semiconductor device, an increase in the relative permittivity of the fourth insulation filmthat is a low-permittivity film on the inner surfaces of the wiring grooveand the via holecan be suppressed in a manufacturing process of a semiconductor device such as a barrier metal sputtering process.