The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2010
Filed:
Jun. 05, 2006
Ikuo Matsukura, Yokohama, JP;
Hiromasa Yamamoto, Yokohama, JP;
Yuichiro Ishibashi, Yokohama, JP;
Shinji Okada, Yokohama, JP;
Naoko Shirota, Yokohama, JP;
Ikuo Matsukura, Yokohama, JP;
Hiromasa Yamamoto, Yokohama, JP;
Yuichiro Ishibashi, Yokohama, JP;
Shinji Okada, Yokohama, JP;
Naoko Shirota, Yokohama, JP;
Asahi Glass Company, Limited, Tokyo, JP;
Abstract
A useful fluoropolymer excellent in transparency and durability to a short wavelength light (an ArF excimer laser having an irradiation wavelength of 193 nm and a F2 excimer laser having an irradiation wavelength of 157 nm) as e.g. a pellicle material, wherein a polymer (I) to be used for a pellicle membrane and/or an adhesive is a polymer essentially containing the following fluorine atom-containing unit (1), wherein a chain forming the polymer main chain comprises a carbon atom and an etheric oxygen atom, at least one carbon atom forming the main chain is a carbon atom forming a cyclic group, and at least one etheric oxygen atom forming the main chain is an oxygen atom forming no cyclic group.