The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 07, 2010

Filed:

Sep. 17, 2009
Applicants:

Seiichiro Takahashi, Ageo, JP;

Seiji Moriuchi, Ageo, JP;

Norihiko Miyashita, Ageo, JP;

Makoto Ikeda, Ageo, JP;

Inventors:

Seiichiro Takahashi, Ageo, JP;

Seiji Moriuchi, Ageo, JP;

Norihiko Miyashita, Ageo, JP;

Makoto Ikeda, Ageo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/453 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention provides a zinc-oxide-based target, having excellent environmental durability. The target contains zinc oxide as a predominant component, and both titanium (Ti) and gallium (Ga) in amounts of 1.1 at. % or more and 4.5 at. % or more, respectively.


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